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Segmental Semi-Markov Models for
Endpoint Detection in Plasma Etching

This document was generated using the LaTeX2HTML translator Version 99.1 release (March 30, 1999)

Copyright © 1993, 1994, 1995, 1996, Nikos Drakos, Computer Based Learning Unit, University of Leeds.
Copyright © 1997, 1998, 1999, Ross Moore, Mathematics Department, Macquarie University, Sydney.

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The translation was initiated by Xianping Ge on 2000-05-16


Xianping Ge
2000-05-16