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Segmental Semi-Markov Models for
Endpoint Detection in Plasma Etching

Xianping Ge and Padhraic Smyth
Information and Computer Science
University of California, Irvine
Irvine, CA 92697-3425
Email: {xge,smyth}@ics.uci.edu

Abstract
Keywords
Introduction
A Viterbi-like Algorithm to Compute the Most Likely State Sequence (MLSS)
A Change-point Detection Algorithm
Pattern matching
Conclusion
Acknowledgements
Bibliography
About this document ...

Xianping Ge
2000-05-16

Segmental Semi-Markov Models for Endpoint Detection in Plasma Etching

Segmental Semi-Markov Models for
Endpoint Detection in Plasma Etching